Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar–N2–BF3–H2 gas system
- 21 August 2001
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 10 (9-10) , 1881-1885
- https://doi.org/10.1016/s0925-9635(01)00424-1
Abstract
No abstract availableKeywords
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