The roles of hydrogen and fluorine in the deposition of cubic boron nitride films in the Ar–N2–BF3–H2 system
- 10 November 2000
- journal article
- research article
- Published by Elsevier in Chemical Physics Letters
- Vol. 330 (3-4) , 243-248
- https://doi.org/10.1016/s0009-2614(00)01101-5
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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