Surface properties of diamond and diamond-like hydrogenated amorphous carbon films resulting from r.f. plasma etching
- 1 May 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 200 (1) , 139-145
- https://doi.org/10.1016/0040-6090(91)90036-w
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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