In-situ low-temperature growth of YBa/sub 2/Cu/sub 3/O/sub 7-x/ films by reactive coevaporation
- 1 March 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 27 (2) , 1009-1012
- https://doi.org/10.1109/20.133964
Abstract
Epitaxial YBa/sub 2/Cu/sub 3/O/sub 7-x/ films were grown in situ by reactive coevaporation using a triple-hearth electron-beam gun system, in which a single electron beam is scanned over constituent metal sources. Superconducting properties were improved by using reactive oxygen species generated from an RF discharge during growth and cooling. Zero-resistance temperatures T/sub c/(R=0) of 86-91 K and critical current densities of around 10/sup 6/ A/cm/sup 2/ at 77 K were obtained over the entire MgOKeywords
This publication has 10 references indexed in Scilit:
- I n-s i t u patterned laser deposition of high-T c Y-Ba-Cu-O superconducting thin filmsJournal of Applied Physics, 1990
- Epitaxial growth of superconducting YBa2Cu3O7−x thin films by reactive magnetron sputteringApplied Physics Letters, 1989
- Thin Film Growth of YBa2Cu3O7-x by ECR Oxygen Plasma Assisted Reactive EvaporationJapanese Journal of Applied Physics, 1989
- Superconducting and structural properties of YBaCuO thin films deposited by inverted cylindrical magnetron sputteringZeitschrift für Physik B Condensed Matter, 1989
- High-temperature superconductivity in ultrathin films of Y1Ba2Cu3O7−xApplied Physics Letters, 1989
- Epitaxial growth of YBa2Cu3O7−x thin films by a laser evaporation processApplied Physics Letters, 1988
- Preferentially oriented epitaxial Y-Ba-Cu-O films prepared by the ion beam sputtering methodJournal of Applied Physics, 1988
- Single-Crystal YBa2Cu3O7-x Thin Films by Activated Reactive EvaporationJapanese Journal of Applied Physics, 1988
- Oxygen ordering and the orthorhombic-to-tetragonal phase transition inPhysical Review B, 1987
- Effect of Oxygen Deficiency on the Crystal Structure and Superconducting Properties of the Ba2YCu3OyJapanese Journal of Applied Physics, 1987