Superconducting and structural properties of YBaCuO thin films deposited by inverted cylindrical magnetron sputtering
- 1 March 1989
- journal article
- research article
- Published by Springer Nature in Zeitschrift für Physik B Condensed Matter
- Vol. 74 (1) , 13-19
- https://doi.org/10.1007/bf01307235
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Low-temperature preparation of superconducting YBa2Cu3O7−δ films on Si, MgO, and SrTiO3 by thermal coevaporationApplied Physics Letters, 1988
- Parameters for i n s i t u growth of high T c superconducting thin films using an oxygen plasma sourceApplied Physics Letters, 1988
- Reliable single-target sputtering process for high-temperature superconducting films and devicesApplied Physics Letters, 1988
- I n s i t u preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputteringApplied Physics Letters, 1988
- Preparation of High-Tc Bi-Sr-Ca-Cu-O Superconducting Thin Films by AC SputteringJapanese Journal of Applied Physics, 1988
- Sputter deposition of YBa2Cu3O7−y thin filmsApplied Physics Letters, 1987
- Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codepositionJournal of Materials Research, 1987
- Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron SputteringJapanese Journal of Applied Physics, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987
- Magnetron dc reactive sputtering of titanium nitride and indium–tin oxideJournal of Vacuum Science and Technology, 1977