Sputter deposition of YBa2Cu3O7−y thin films
- 21 December 1987
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (25) , 2149-2151
- https://doi.org/10.1063/1.98976
Abstract
Thin films of YBa2Cu3O7−y were prepared by magnetron sputtering. The films were characterized by x‐ray diffraction, in situ x‐ray photoelectron spectroscopy to determine the as‐deposited oxygen content for various substrate temperatures, and scanning electron microscopy to analyze the microstructure. The orthorhombic phase was observed after an ex situ 700 °C anneal. We have obtained films which were completely superconducting at 82 K with 6 K transition widths.Keywords
This publication has 10 references indexed in Scilit:
- Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codepositionJournal of Materials Research, 1987
- Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−xApplied Physics Letters, 1987
- Critical current densities and transport in superconducting YBa2Cu3O7−δ films made by electron beam coevaporationApplied Physics Letters, 1987
- Structural and superconducting properties of orientation-ordered films prepared by molecular-beam epitaxyPhysical Review B, 1987
- Superconducting Y-Ba-Cu-O oxide films by sputteringApplied Physics Letters, 1987
- Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba2YCu3O7-y Thin FilmJapanese Journal of Applied Physics, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987
- Thin superconducting oxide filmsPhysical Review B, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- Possible highT c superconductivity in the Ba?La?Cu?O systemZeitschrift für Physik B Condensed Matter, 1986