Preparation of High-Tc Bi-Sr-Ca-Cu-O Superconducting Thin Films by AC Sputtering
- 1 March 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (3A) , L376
- https://doi.org/10.1143/jjap.27.l376
Abstract
Thin films of Bi-Sr-Ca-Cu-O superconductors were prepared on a polycrystalline YSZ substrate by the 50 Hz ac sputtering method. A pair of targets with various compositions were used in this apparatus. The films deposited without intentional heating were amorphous insulators. When the films were annealed at temperatures ranging from 750°C to 900°C, X-ray diffraction analysis showed that they had highly oriented periodic superstructures with various planar spacings. A specimen annealed at 800°C for 120 min has T c(onset) and T c(zero resistive) of 115 K and 73 K, respectively.Keywords
This publication has 3 references indexed in Scilit:
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- High Tc Yb-Ba-Cu-O Thin Films Deposited on Sintered YSZ Substrates by SputteringJapanese Journal of Applied Physics, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987