Simple low-cost microwave plasma source
- 1 February 1986
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (2) , 164-166
- https://doi.org/10.1063/1.1138961
Abstract
A generator-cavity system is described which is capable of delivering 0–600 W of microwave power at 2.45 GHz. The power generating section has been constructed from components contained in a portable home microwave oven and the cavity was assembled from easily machinable pieces. The cw magnetron source was mounted directly on a cylindrical microwave cavity. The plasma was contained in an on-axis 20-mm o.d. quartz tube. Design tradeoffs and operating information are discussed.Keywords
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