Substrate Annealing and the MBE Growth of Silicon on Sapphire.
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Growth of thin silicon films on sapphire and spinel by molecular beam epitaxyApplied Physics Letters, 1980
- Silicon-on-Sapphire Epitaxy by Vacuum Sublimation: LEED–Auger Studies and Electronic Properties of the FilmsJournal of Vacuum Science and Technology, 1971
- Handbook of Thin Film TechnologyJournal of the Electrochemical Society, 1971
- Thin Film PhenomenaJournal of the Electrochemical Society, 1970