Cathode sputtering in inert-gas glow discharges
- 1 September 1961
- journal article
- Published by IOP Publishing in British Journal of Applied Physics
- Vol. 12 (9) , 465-468
- https://doi.org/10.1088/0508-3443/12/9/309
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Low-Energy Sputtering Yields in HgPhysical Review B, 1958
- Sputtering Yields for Normally Incident-Ion Bombardment at Low Ion EnergyPhysical Review B, 1957
- Controlled Sputtering of Metals by Low-Energy Hg IonsPhysical Review B, 1956
- Current Rating and Life of Cold-Cathode TubesTransactions of the American Institute of Electrical Engineers, 1941
- Kathodenzerstäubung bei sehr geringen GasdrückenThe European Physical Journal A, 1930
- Kathodenzerst ubungThe European Physical Journal A, 1926