New method for achieving very high sensitivities of MOSFET gas sensors
- 1 January 1990
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 1 (1-6) , 25-30
- https://doi.org/10.1016/0925-4005(90)80166-w
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Performance of gas-sensitive Pd-gate mosfets with SiO2 and Si3N4 gate insulatorsSensors and Actuators, 1983
- Hydrogen sensitive mos-structuresSensors and Actuators, 1981