Infrared spectra of amorphous SiNx:H films
- 1 December 1985
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 77-78, 1117-1120
- https://doi.org/10.1016/0022-3093(85)90854-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Nitrogen-bonding environments in glow-discharge—depositedfilmsPhysical Review B, 1983
- Infrared Spectrum and Structure of Hydrogenated Amorphous SiliconPhysica Status Solidi (b), 1980
- Properties of Amorphous Silicon Nitride FilmsJournal of the Electrochemical Society, 1966