Measured attenuation of coplanar waveguide on CMOSgrade silicon substrates with polyimide interface layer

25 June 1998

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 34 (13) , 1327-1329
https://doi.org/10.1049/el:19980840

Abstract

The measured propagation constant of a coplanar waveguide on CMOS grade silicon with a polyimide interface layer is presented. It is shown that the transmission line can have an attenuation comparable to other transmission lines on Si substrates if the proper polyimide thickness is used.

Keywords

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