Supplementary Sputtering Calculations
- 15 February 1957
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 105 (4) , 1202-1203
- https://doi.org/10.1103/physrev.105.1202
Abstract
The theoretical curves of a preceding paper have been recalculated using the sputtering threshold values predicted by Wehner. The parameters of the new calculation follow a more regular pattern, and the numerical values are more realistic. Although the new curves differ from those previously reported, the variations are hardly significant.Keywords
This publication has 2 references indexed in Scilit:
- Theory of the Sputtering ProcessPhysical Review B, 1956
- Controlled Sputtering of Metals by Low-Energy Hg IonsPhysical Review B, 1956