Surface micromachined piezoelectric resonant beam filters
- 15 July 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 91 (3) , 313-320
- https://doi.org/10.1016/s0924-4247(01)00601-x
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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