Micro Electro Mechanical Systems: From Research to Applications
- 1 December 1998
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 37 (12S)
- https://doi.org/10.1143/jjap.37.7047
Abstract
Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.Keywords
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