Impact of MEMS technology on society
- 1 August 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 56 (1-2) , 1-9
- https://doi.org/10.1016/0924-4247(96)01284-8
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Micromachines on the marchIEEE Spectrum, 1994
- Piezoresistance Effect in Germanium and SiliconPhysical Review B, 1954