Preparation of superconducting thin films of bismuth strontium calcium copper oxides by reactive sputtering
- 18 July 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (3) , 246-248
- https://doi.org/10.1063/1.100589
Abstract
Superconducting thin films of Bi-Sr-Ca-Cu-oxides have been reproducibly prepared by reactive magnetically enhanced triode sputtering using three separate metal targets (Sr, Ca, and Cu-Bi). Oxygen was introduced directly at the substrates during film growth. The films were deposited on ambient temperature substrates [Al2O3, SrTiO3, and yttria-stabilized zirconia (YSZ)] and had thicknesses of 0.5–1.5 μm. After deposition, the films were annealed at 850–900 °C in flowing oxygen. The electrical resistance of the best films on YSZ decreased approximately linearly with temperature until the onset of superconductivity at about 85 K. Zero resistance was achieved by 74 K. Critical current densities in excess of 5×105 A/cm2 at 4.2 K were also obtained. X-ray diffraction demonstrated that the best films were nearly single phase (Bi2Sr2Ca1Cu2O8+x) and textured with the c axis perpendicular to the substrate. The effect of composition and annealing on our results is discussed.Keywords
This publication has 9 references indexed in Scilit:
- Preparation of superconducting thin films of calcium strontium bismuth copper oxides by coevaporationApplied Physics Letters, 1988
- Superconductivity in the high-Bi-Ca-Sr-Cu-O system: Phase identificationPhysical Review Letters, 1988
- Superconductivity in thin films of the Bi-Ca-Sr-Cu-O systemPhysics Letters A, 1988
- A New High-Temperature Superconductor: Bi 2 Sr 3-x Ca x Cu 2 O 8+yScience, 1988
- A New High-Tc Oxide Superconductor without a Rare Earth ElementJapanese Journal of Applied Physics, 1988
- Reproducible technique for fabrication of thin films of high transition temperature superconductorsApplied Physics Letters, 1987
- Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−xApplied Physics Letters, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987
- Preparation of AgMo6S8 thin films by reactive sputteringPhysica B+C, 1985