Charge trapping in silicon-rich Si3N4 thin films
- 1 December 1987
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 30 (12) , 1295-1301
- https://doi.org/10.1016/0038-1101(87)90055-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Gap states in silicon nitrideApplied Physics Letters, 1984
- High field conduction processes in silicon nitride films in the presence of charge trappingThin Solid Films, 1976
- Contact currents in silicon nitrideJournal of Applied Physics, 1976
- Electron and hole transport in CVD Si3N4 filmsApplied Physics Letters, 1975