New high-efficiency quasi-continuous operation of a KrF(B→X) excimer lamp excited by microwave discharge
- 26 June 1989
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (26) , 2619-2621
- https://doi.org/10.1063/1.101039
Abstract
A quasi‐continuous KrF(B→X) fluorescence of >8 ms pulse duration with 100 Hz operation frequency was observed in a microwave discharge‐pumped KrF lamp. The average KrF fluorescence power was 53 W, obtained with an intrinsic efficiency of 8.3% with a 678 W average microwave power deposition. We also obtained a peak KrF fluorescence power of 120 W with a power efficiency of 12.1%.Keywords
This publication has 7 references indexed in Scilit:
- Theoretical and experimental study of KrF fluorescence in a multimicrosecond longitudinal dischargeIEEE Transactions on Plasma Science, 1988
- Properties of a KrF laser with atmospheric-pressure Kr-rich mixture pumped by an electron beamJournal of Applied Physics, 1985
- Theoretical analysis of a self-sustained discharge pumped XeCl laserJournal of Applied Physics, 1984
- Theoretical analysis of electron-beam-excited KrF laser performance: New F2concentration optimizationIEEE Journal of Quantum Electronics, 1983
- 200-MHz electrodeless discharge excitation of an XeF laserApplied Physics Letters, 1982
- A closely spaced (50 μm) array of 16 individually addressable buried heterostructure GaAs lasersApplied Physics Letters, 1982
- A microwave-pumped XeCl* laserApplied Physics Letters, 1981