Angular-selective optical transmittance of highly transparent Al-oxide-based films made by oblique-angle sputtering
- 15 August 1995
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (4) , 2894-2896
- https://doi.org/10.1063/1.360034
Abstract
Films with angular and spectral selectivity of the optical transmittance were produced by reactive magnetron sputtering with oblique incidence of the deposition species towards a substrate. These data could be reconciled with multiparameter fits to a model based on the Maxwell Garnett effective medium theory applied to a three‐component structure with inclined columns, surrounded by voids, comprised of elongated Al particles in an Al2O3 matrix.This publication has 19 references indexed in Scilit:
- Angular selective optical transmittance through Cr-based films made by oblique angle sputtering: experiment and theoryJournal of Physics D: Applied Physics, 1995
- A model for the optical response of obliquely deposited thin filmsJournal of Physics D: Applied Physics, 1992
- Cermets for angular selective transmittanceSolar Energy Materials and Solar Cells, 1992
- Useful angular selectivity in oblique columnar aluminumJournal of Applied Physics, 1991
- Effective medium theory and angular dispersion of optical constants in films with oblique columnar structureOptics Communications, 1989
- Grain-size effects in the parallel-band absorption spectrum of aluminumPhysical Review B, 1986
- Infrared optical properties of evaporated alumina filmsApplied Optics, 1981
- Absolute Values of the Optical Constants of Some Pure MetalsPhysica Scripta, 1971
- Interband Absorption and the Optical Properties of Polyvalent MetalsPhysical Review B, 1971
- Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen SubstanzenAnnalen der Physik, 1935