Angular selective optical transmittance through Cr-based films made by oblique angle sputtering: experiment and theory
- 14 March 1995
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 28 (3) , 600-602
- https://doi.org/10.1088/0022-3727/28/3/024
Abstract
Sputter deposition of Cr, with oblique incidence of the species towards a substrate, has been used to produce films with angular selective optical transmittance. Multiparameter fits, embodying the Bruggeman effective medium theory applied to an anisotropic medium of Cr and voids, were able to reproduce the optical data.Keywords
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