Modeling of electronegative radio-frequency discharges
- 1 April 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 19 (2) , 122-129
- https://doi.org/10.1109/27.106805
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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