Critical aspects of high energy implants for CMOS technology: Channeling effects and masking problems

This publication has 2 references indexed in Scilit:

• Optimized retrograde N-well for 1-μm CMOS technology
  IEEE Journal of Solid-State Circuits, 1986
• Applications of MeV ion beams to material processing
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985