Microfabrication of molecular scale microstructures
- 2 March 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (9) , 504-506
- https://doi.org/10.1063/1.98158
Abstract
Microfabrication techniques have been used to prepare a new class of molecular scale microporous materials. These materials are formed by chemically etching slots into alternate layers of a lithographically exposed amorphous superlattice cross section. The slot width is accurately controllable from 10 Å to more than 500 Å.Keywords
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