Microelectronic and medical applications of an ion beam milling system
- 1 March 1983
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 18 (3) , 741-752
- https://doi.org/10.1007/bf00745572
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- The use of scanning electron microscopy to study the ion beam sputter modification of the surface topography of biological implantsJournal of Materials Science, 1982
- Influence of the ion incidence angle of alumina surface cleanness, roughness and topographyJournal of Materials Science, 1982
- Microfabrication by ion-beam etchingJournal of Vacuum Science and Technology, 1979
- Ion beam texturingJournal of Vacuum Science and Technology, 1977
- Surface texturing by sputter etchingJournal of Vacuum Science and Technology, 1976
- Comparison of the properties of different materials used as masks for ion-beam etchingJournal of Vacuum Science and Technology, 1975
- Ion−beam etchingJournal of Vacuum Science and Technology, 1975
- Prediction of the apex angle of surface cones on ion-bombarded crystalline materialsJournal of Materials Science, 1974