Emission-angle integrated yields of neutral clusters in sub-keV-energy sputtering
- 1 June 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 58 (3-4) , 438-442
- https://doi.org/10.1016/0168-583x(91)95882-e
Abstract
No abstract availableKeywords
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