Measurements of energy distributions and yields of neutral Cu2 and Cu3 species sputtered from Cu by low energy Ar+ ions
- 1 September 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 43 (2) , 136-145
- https://doi.org/10.1016/0168-583x(89)90026-8
Abstract
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