The sputtering processes during 6 kev Xe ion beam bombardment of halides

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Abstract
Mass selected energy distributions of sputtered atoms and molecules from AgBr, AgF, CdI2 and PbI2 have been measured using a time of flight method. The analysis of experimental data shows a complex character of the sputtering which can be explained by a simultaneous appearance of three different processes: collision cascade, thermal spike and thermal evaporation of decomposed target material. The analytical expressions for energy distributions given by the three sputtering mechanisms are in very good agreement with the experimental spectra. Physical parameters of the energy distributions: E b (surface binding energy), T sp (mean temperature of the spike) and T (macroscopic surface temperature) are obtained and their physical meaning is discussed. A comparison between existing sputtering theories and results of the investigations is presented.