Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 32 (1) , 122-128
- https://doi.org/10.1109/20.477561
Abstract
No abstract availableKeywords
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