Nickel-filled Hexsil Thermally Actuated Tweezers

Publisher Website

24 August 2005

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/sensor.1995.721825

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Hexsil Bimorphs For Vertical Actuation
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
Polysilicon microgripper
Sensors and Actuators A: Physical, 1992