Control of reactive d.c. planar magnetron sputtering of chromium nitride
- 20 May 1992
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 52 (3) , 243-250
- https://doi.org/10.1016/0257-8972(92)90022-3
Abstract
No abstract availableKeywords
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