Internal stresses in metallic films deposited by cylindrical magnetron sputtering
- 1 November 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 64 (1) , 111-119
- https://doi.org/10.1016/0040-6090(79)90550-9
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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