Indium nitride (InN): A review on growth, characterization, and properties
Top Cited Papers
- 1 September 2003
- journal article
- review article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 94 (5) , 2779-2808
- https://doi.org/10.1063/1.1595135
Abstract
During the last few years the interest in the indium nitride (InN) semiconductor has been remarkable. There have been significant improvements in the growth of InN films. High quality single crystalline InN film with two-dimensional growth and high growth rate are now routinely obtained. The background carrier concentration and Hall mobility have also improved. Observation of strong photoluminescence near the band edge is reported very recently, leading to conflicts concerning the exact band gap of InN. Attempts have also been made on the deposition of InN based heterostructures for the fabrication of InN based electronic devices. Preliminary evidence of two-dimensional electron gas accumulation in the InN and studies on InN-based field-effect transistor structure are reported. In this article, the work accomplished in the InN research, from its evolution to till now, is reviewed. The In containing alloys or other nitrides (AlGalnN, GaN, AlN) are not discussed here. We mainly concentrate on the growth, characterization, and recent developments in InN research. The most popular growth techniques, metalorganic vapor phase epitaxy and molecular beam epitaxy, are discussed in detail with their recent progress. Important phenomena in the epitaxial growth of InN as well as the problems remaining for future stuby are also discussedKeywords
This publication has 171 references indexed in Scilit:
- Preparation of InN nanocrystals by solvo-thermal methodJournal of Crystal Growth, 2002
- Enhanced two-dimensional growth of MOVPE InN films on sapphire (0001) substratesJournal of Crystal Growth, 2001
- InN thin films grown by metalorganic molecular beam epitaxy on sapphire substratesJournal of Crystal Growth, 2001
- Nitridation effects of GaP(111)B substrate on MOCVD growth of InNJournal of Crystal Growth, 2000
- High-density plasma etch selectivity for the III–V nitridesSolid-State Electronics, 1998
- Growth of group III nitrides by metalorganic molecular beam epitaxyJournal of Crystal Growth, 1997
- Pulsed laser deposition of epitaxial AlN, GaN, and InN thin films on sapphire(0001)Journal of Crystal Growth, 1997
- Morphology and structure of indium nitride filmsApplications of Surface Science, 1985
- Synthesis of III–V semiconductor nitrides by reactive cathodic sputteringThin Solid Films, 1976
- Thermal stability of indium nitride at elevated temperatures and nitrogen pressuresMaterials Research Bulletin, 1970