Morphology and deposition rates of TiB2 prepared by chemical vapour deposition of TiCl4 + B2H6 system
- 1 February 1990
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 25 (2) , 1069-1075
- https://doi.org/10.1007/bf03372205
Abstract
No abstract availableKeywords
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