Rapid Synthesis of the YBa2Cu3Ox Film on Metal Substrate by Chemical Vapor Deposition Technique
- 1 July 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (7R)
- https://doi.org/10.1143/jjap.30.1398
Abstract
A new chemical vapor deposition technique has been developed for rapid (max. 24 µm/h) formation of the oxide superconductor film on a metal substrate. In this system, blended β-diketonate chelates of source materials were slowly fed to the vaporizer with carrier gas. The source gas from the vaporizer and O2 gas were introduced into the reactor. We realized a superconducting YBCO thin film that had a T c=87 K on a Hastelloy C-276 substrate.Keywords
This publication has 3 references indexed in Scilit:
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- Rapid chemical vapor deposition of superconducting YBa2Cu3OxApplied Physics Letters, 1990
- Superconducting properties of Ba2YCu3O7−x thin films prepared by chemical vapor deposition on SrTiO3 and a metal substrateApplied Physics Letters, 1989