Rapid chemical vapor deposition of superconducting YBa2Cu3Ox
- 19 March 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (12) , 1175-1177
- https://doi.org/10.1063/1.103330
Abstract
A process has been developed that enables the rapid chemical vapor deposition of superconducting YBa2Cu3Ox. In this process a finely ground mixture of Y(tmhd)3, Ba(tmhd)2, and Cu(tmhd)2 (tmhd=2,2,6,6‐tetramethyl‐3,5‐heptanedionate) is slowly fed, and pneumatically transported, directly into the chemical vapor deposition furnace. Because vaporizers are not used, the number of process parameters that must be controlled is greatly reduced. Deposition rates are at least an order of magnitude greater than those achieved by reagent sublimation. Films have been characterized by scanning electron microscopy, energy dispersive x‐ray spectroscopy, x‐ray diffraction, and resistance versus temperature measurements. Films produced on planar MgO substrates have Tc values that are significantly higher than previously reported for MgO.Keywords
This publication has 19 references indexed in Scilit:
- Critical currents at 77.3 K under magnetic fields up to 27 T for an Y-Ba-Cu-O film prepared by chemical vapor depositionApplied Physics Letters, 1989
- c-axis oriented YBa2Cu3O7−x superconducting films by metalorganic chemical vapor depositionApplied Physics Letters, 1989
- Superconducting thin films of Y-Ba-Cu-oxide by sol-gel and CVD methodsPhysica C: Superconductivity and its Applications, 1988
- Organometallic chemical vapor deposition of high T c superconducting films using a volatile, fluorocarbon-based precursorApplied Physics Letters, 1988
- Chemical vapor deposition of YBa2Cu3O7 using metalorganic chelate precursorsApplied Physics Letters, 1988
- Y-Ba-Cu-O superconducting films prepared on SrTiO3 substrates by chemical vapor depositionApplied Physics Letters, 1988
- Preparation of Y-Ba-Cu-O Superconducting Thin Film by Chemical Vapor DepositionJapanese Journal of Applied Physics, 1988
- Superconducting Y-Ba-Cu-O Oxide Films by OMCVDJapanese Journal of Applied Physics, 1988
- Preparation of YBa2Cu3O7−x Films by Chemical Vapor DepositionChemistry Letters, 1988
- Formation of high T c superconducting films by organometallic chemical vapor depositionApplied Physics Letters, 1988