c-axis oriented YBa2Cu3O7−x superconducting films by metalorganic chemical vapor deposition
- 23 January 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (4) , 380-382
- https://doi.org/10.1063/1.101378
Abstract
Highly textured single phase superconducting YBa2Cu3O7−x films have been successfully grown on the yttria‐stabilized zirconia (100) substrates by using the metalorganic chemical vapor deposition technique. The as‐deposited films grown at 650 °C were homogeneous mixtures of the related metal oxides and carbonates. Subsequent thermal annealing under oxygen flow yielded single phase superconducting films whose thickness corresponded to the deposition rates of approximately 10 μm/h. After the post‐annealing the films deposited on the yttria‐stabilized zirconia substrates exhibited a highly textured x‐ray pattern with c axis perpendicular to the substrate surface. These films show an onset superconducting transition temperature of 93 K with the resistance becoming zero at 84 K.Keywords
This publication has 15 references indexed in Scilit:
- Low-temperature preparation of superconducting YBa2Cu3O7−δ films on Si, MgO, and SrTiO3 by thermal coevaporationApplied Physics Letters, 1988
- As-deposited high T c and J c superconducting thin films made at low temperaturesApplied Physics Letters, 1988
- As-deposited superconducting Y-Ba-Cu-O thin films on Si, Al2O3, and SrTiO3 substratesApplied Physics Letters, 1988
- Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codepositionJournal of Materials Research, 1987
- Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−xApplied Physics Letters, 1987
- Interference between direct and rearrangement mechanisms for double ionizationPhysical Review A, 1987
- Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba2YCu3O7-y Thin FilmJapanese Journal of Applied Physics, 1987
- Critical-current measurements in epitaxial films of compoundPhysical Review Letters, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- Possible highT c superconductivity in the Ba?La?Cu?O systemZeitschrift für Physik B Condensed Matter, 1986