Preparation of Y-Ba-Cu-O Superconducting Thin Film by Chemical Vapor Deposition
- 1 September 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (9A) , L1683
- https://doi.org/10.1143/jjap.27.l1683
Abstract
Y-Ba-Cu-O film was prepared by chemical vapor deposition using tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) (Y(DPM)3), bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium(II) (Ba(HFA)2) and bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)copper(II) (Cu(HFA)2). Superconducting transition was observed with T c(onset)=83 K and T c(R=0)=65 K for these CVD films after an annealing process. Typical films of Y-Ba-Cu-O on a (001) SrTiO3 substrate exhibited the presence of YBa2Cu3O y according to X-ray diffraction patterns.Keywords
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