Superconducting Y-Ba-Cu-O Oxide Films by OMCVD
- 1 July 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (7A) , L1265-1267
- https://doi.org/10.1143/jjap.27.l1265
Abstract
Formation of Y-Ba-Cu-O films have been attempted by the organometallic chemical vapor deposition (OMCVD) method using Y(thd)3, Ba(thd)2, and Cu(thd)2 (thd=2,2,6,6,-tetramethyl-3,5-heptanedione), which are organic metal chelates, as gas sources. The results of electron probe microanalysis (EPMA) show that the film formed has a composition similar to that of YBa2Cu3O x ceramics. The film has a high resistivity in the as-deposited state. If the film is conditioned at 950°C for 30 minutes, the resistivity reduces extremely, providing a superconductivity. T c onset is 76 K and T c final is 60 K.Keywords
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