A new method for determining the thickness and composition of thin layers by electron probe microanalysis
- 1 November 1985
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 20 (11) , 1427-1433
- https://doi.org/10.1002/crat.2170201102
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Quantitative electron probe microanalysis using Gaussian ϕ(ρz) CurvesX-Ray Spectrometry, 1982
- Electron backscattering from thin filmsJournal of Applied Physics, 1982
- A Gaussian expression to describe ϕ(ρz) curves for quantitative electron probe microanalysisX-Ray Spectrometry, 1981
- Measurements of the electron backscattering coefficient for quantitative EPMA in the energy range of 4 to 40 keVPhysica Status Solidi (a), 1979
- Quantitative Electron Microprobe Analysis of Thin Films on SubstratesIBM Journal of Research and Development, 1974