Depth Resolved Diffuse Scattering from Buried CoSi2 Layers in Silicon
- 1 January 1992
- book chapter
- Published by Springer Nature in Springer Proceedings in Physics
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Formation of buried CoSi2 by ion implantationApplied Surface Science, 1989
- Diffuse scattering of x rays at grazing angles from near-surface defects in crystalsPhysical Review B, 1989
- X-ray and neutron scattering from rough surfacesPhysical Review B, 1988
- Evanescent absorption in kinematic surface Bragg diffractionPhysical Review B, 1987
- The theory of diffuse X-ray scattering and its application to the study of point defects and their clustersJournal of Physics F: Metal Physics, 1973
- Surface Studies of Solids by Total Reflection of X-RaysPhysical Review B, 1954