Influence of sputtering of the films on compound formation in film/film and bulk/film systems
- 1 April 1985
- journal article
- research article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 106 (2) , 287-292
- https://doi.org/10.1016/0022-5088(85)90265-6
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Possibility of and conditions for the room temperature formation of compounds at the bulk metal/thin metal film interfaceJournal of the Less Common Metals, 1983
- Room temperature interactions in copper-metal thin film couplesJournal of the Less Common Metals, 1980
- Room temperature interactions in Ag-metals thin film couplesThin Solid Films, 1979
- Thin film interdiffusion of Au and Ga at room temperatureThin Solid Films, 1976
- Surface temperature measurements during thin film deposition by r.f. sputteringThin Solid Films, 1975