A comparison of squeeze-film theory with measurements on a microstructure
- 1 March 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 36 (1) , 79-87
- https://doi.org/10.1016/0924-4247(93)80144-6
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- A resonant pressure sensor based on a squeezed film of gasSensors and Actuators A: Physical, 1993
- Micromachined capacitive accelerometerSensors and Actuators A: Physical, 1991
- Capacitive silicon accelerometer with highly symmetrical designSensors and Actuators A: Physical, 1990
- Accelerometer systems with self-testable featuresSensors and Actuators, 1989
- Resonant-microbridge vapor sensorIEEE Transactions on Electron Devices, 1986
- On Isothermal Squeeze FilmsJournal of Lubrication Technology, 1983
- Miniaturization of Tuning ForksScience, 1968
- The resonant gate transistorIEEE Transactions on Electron Devices, 1967
- A Study of Fluid Squeeze-Film DampingJournal of Basic Engineering, 1966
- Isothermal squeeze filmsQuarterly of Applied Mathematics, 1962