Composition of SiCN crystals consisting of a predominantly carbon-nitride network
- 1 February 1997
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 12 (2) , 322-325
- https://doi.org/10.1557/jmr.1997.0045
Abstract
We report here on the synthesis of large crystals of Si-containing carbon nitride, consisting of a predominantly C–N network, by microwave CVD. The Si content in this material varies from crystal to crystal and also with the deposition conditions and has been observed to be as low as less than 5 at.% in some crystals, wherein the Si atoms are believed to substitute for some of the C sites only. This is the first time that such large and well-faceted crystals consisting almost entirely of carbon-nitride network have been synthesized. Moreover, there is no obvious deposition of amorphous CN material.Keywords
This publication has 17 references indexed in Scilit:
- Superhard and Elastic Carbon Nitride Thin Films Having Fullerenelike MicrostructurePhysical Review Letters, 1995
- Is carbon nitride harder than diamond? No, but its girth increases when stretched (negative Poisson ratio)Chemical Physics Letters, 1995
- Carbon nitride films synthesized by combined ion-beam and laser-ablation processingPhysical Review B, 1995
- Relative stability of hexagonal and planar structures of hypotheticalsolidsPhysical Review B, 1995
- Electronic and mechanical properties of carbon nitride films prepared by laser ablation graphite under nitrogen ion beam bombardmentApplied Physics Letters, 1994
- Physical properties of a-C: N films produced by ion beam assisted depositionJournal of Materials Research, 1994
- Growth and structure of CN thin films prepared by radio frequency reactive sputteringSolid State Communications, 1993
- Nano-indentation studies of ultrahigh strength carbon nitride thin filmsJournal of Applied Physics, 1993
- Formation of Carbon Nitride Films by Means of Ion Assisted Dynamic Mixing (IVD) MethodJapanese Journal of Applied Physics, 1993
- Prediction of New Low Compressibility SolidsScience, 1989