Theoretical aspects of cathode sputtering in the energy range of 5–25 keV

• 30 November 1960
• journal article
• other
• Published by Elsevier in Physica
• Vol. 26  (11) , 1009-1011
• https://doi.org/10.1016/0031-8914(60)90051-3

Abstract

Keywords

• THEORETICAL ASPECTS
• CATHODE SPUTTERING
• ENERGY RANGE
• KEV
• ASPECTS OF CATHODE