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  3. Theoretical aspects of cathode sputtering in the energy range of 5–25 keV
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  5. 10.1016/0031-8914(60)90051-3
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  3. Theoretical aspects of cathode sputtering in the energy range of 5–25 keV
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  5. 10.1016/0031-8914(60)90051-3

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