Elimination of Oxidation‐Induced Stacking Faults by Preoxidation Gettering of Silicon Wafers: I . Phosphorus Diffusion‐Induced Misfit Dislocations
- 1 December 1975
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 122 (12) , 1725-1729
- https://doi.org/10.1149/1.2134118