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  3. Elimination of Oxidation‐Induced Stacking Faults by Preoxidation Gettering of Silicon Wafers: I . Phosphorus Diffusion‐Induced Misfit Dislocations
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  5. 10.1149/1.2134118
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  3. Elimination of Oxidation‐Induced Stacking Faults by Preoxidation Gettering of Silicon Wafers: I . Phosphorus Diffusion‐Induced Misfit Dislocations
  4. Cited-By
  5. 10.1149/1.2134118

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