A combined vacuum interlock and preparation assembly for MBE and surface analysis
- 1 May 1983
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 16 (5) , 364-366
- https://doi.org/10.1088/0022-3735/16/5/002
Abstract
A vacuum interlock system for sample transfer into an interlock carousel station is described. In this station samples can be stored and prepared before being further transferred into an MBE (molecular beam epitaxy) system of an auxiliary analysis chamber. The described system is a redesign of the commercial load-lock system on the Varian MBE-360 system.Keywords
This publication has 2 references indexed in Scilit:
- Molecular beam epitaxy: An emerging epitaxy technologyThin Solid Films, 1981
- Vacuum interlock system for molecular beam epitaxyReview of Scientific Instruments, 1978